SENTECH Plasma Process Technology Seminar and Workshop 2026 – innovation, results, discussion!
May 6 to 7, 2026, Berlin-Adlershof
This event was designed to bring cutting-edge plasma process technology to the forefront, featuring expert speakers from research and industry who shared their latest process advancements and development in plasma etching and deposition using ALE, ICP-RIE, cryo etching, ALD and ICPECVD techniques. The topics covered included working with superconducting metals, oxides, nitrides, wide band gap and organic materials for a wide range of advanced applications such as telecommunications, micro and nano optoelectronics, 2D and quantum technologies.
Brand new for 2026 was the plasma process workshop held on day two! The workshop content was designed to give our participants the chance to take a deep dive into plasma processing using SIA, the SENTECH plasma operation software. Including live demonstrations and practical, hands-on sessions on user-friendly recipe editing, endpoint detection and flexible data analysis.
Thank you to all of our participants for the great questions and lively debate. We would like to extend a special thank you to all of our speakers for the fantastic presentations and the open discussion of your process and fabrication challenges, and for sharing your innovative solutions and results.
If you would like to take a look at the topics covered during both the plasma seminar and workshop, please take a look at the full agenda below.
Program-SENTECH-Plasma-Process-Technology-seminar-workshop
If you would like more information or have any questions, please do not hesitate to contact us. You can download our latest brochures or request more information directly from our system website paged.
If you were not able to attend in person and would like to find out more about the full range of modular and versatile SENTECH Plasma Process Systems? Click here
