Plasma Process Technology
and Thin Film Metrology

Discover SENTECH, a leading provider of low-damage plasma process systems and thin film metrology tools for semiconductor research and industry.

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Explore Our Products

Visit our comprehensive product overview, to learn more about the latest developments in plasma process technology systems and thin film metrology tools from SENTECH.

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Plasma Process Technology​

Discover the reliable, durable, and versatile low-damage plasma etch and deposition systems from SENTECH.​

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Thin Film Metrology

Explore the thin film metrology tools designed to deliver repeatable, consistent, and accurate results.​

Applications and Industries

SENTECH provides ongoing application support for the lifetime of your system or tool. Speak to our experts to help you find the solutions to your process challenges.

MEMS

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced micro-electromechanical systems and applications.

Optoelectronics

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced optoelectronics applications.

Power Devices

Learn more about GaN and SiC, the materials supporting this emerging technology in the semiconductor industry.

Sensors

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced sensor applications.

Quality Control

Optimise your etch and deposition processes for performance, reliability, and yield with precision thin film metrology tools for quality control.

Contact us and request a quote

Upcoming Events

15 – 18 March 2026

The 73rd JSAP Spring Meeting 2026

Visit SENTECH at the 73rd JSAP Spring Meeting

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17 - 18 March 2026

The 9th International Conference “ALD FOR INDUSTRY”

SENTECH is attending ALD for Industry – visit our booth!

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ALD for Industry

Working at SENTECH

Located in Germany’s leading science and technology park Adlershof in Berlin, SENTECH Instruments has become one of the world market leaders in equipment production for plasma process technology and thin film metrology. Click on “Careers” to see a full list of our current vacancies.