SI 500 ICP-RIE System
The SENTECH SI 500 ICP-RIE high-end plasma etch system uses an inductively coupled plasma (ICP) source with low ion energy for low-damage etch and nanostructuring.
SE 401adv In-Situ Laser Ellipsometer
In-situ sub-angstrom precision measurement of ultra-thin, single-layer films.
RM 1000 QC Automated Spectroscopic Reflectometer for Quality Control
The RM 1000 QC is designed for fast and easy thickness measurement of transparent and semi-transparent films on patterned wafers for quality control within industrial production processes.
SIPAR ICP Deposition System Combining PECVD and ALD in One Reactor
The inductively coupled plasma (ICP) deposition system SIPAR combines plasma-enhanced chemical vapour deposition (PECVD) and atomic layer deposition (ALD) in one Reactor.
Comprehensive Thin Film Measurement Software – FTPadv Expert
The spectroscopic reflectometry software FTPadv Expert is especially designed for measuring and analysing R(λ) and T(λ). Spectral data analyses for determining thin film thickness, extinction coefficient or refractive index of materials have been implemented into the software, enabling the material description and fitting by standard industry parameters.
SENDURO accuva10 Fully-Automated Thin Film Quality Control
The SENDURO accuva10 is designed for fully automated, precise and repeatable measurement of film thickness, refractive index, and extinction coefficient of materials relevant to MEMS and sensor fabrication.
SER 800 PV Spectroscopic Ellipsometer for Photovoltaic Applications
The spectroscopic ellipsometer SER 800 PV is the ideal tool for the analysis of functional and antireflective coatings on textured crystalline silicon solar cells in a R&D environement.
SE 400adv PV Laser Ellipsometer for Photovoltaic Applications
The multi-angle laser ellipsometer SE 400adv PV provides film thickness and refractive index of anti-reflective single films on textured monocrystalline and multicrystalline silicon wafers at the HeNe laser wavelength of 632.8 nm.
SENsolar PV Quality Control for Front and Back Side Photovoltaic Manufacturing
QC for multi- and c-Si based PERC, HJT, TOPCON, and Perovskites solar cell manufacturing
FTPadv Film Thickness Probe
The FTPadv is a cost-effective table top solution for spectroscopic reflectometry which features rapid thickness measurements. A measurement is performed in less than 100 ms with a precision of lower than 0.3 nm and film thickness range of 50 nm – 25 µm. A broad range of predefined recipes are included for easy spectroscopic reflectometry operation