SI 500 ICP-RIE System

The SENTECH SI 500 ICP-RIE high-end plasma etch system uses an inductively coupled plasma (ICP) source with low ion energy for low-damage etch and nanostructuring.

SI 500 D ICPECVD System

Inductively coupled (IC) PECVD system, the SENTECH SI 500 D for high density, low ion energy, and low-pressure plasma deposition of dielectric films and low-damage, low-temperature deposition for passivation layers.

Quality Control

Quality control Quality control plays a crucial role in ensuring the reliability, performance, consistency of semiconductor etch and deposition processes. Using precision metrology tools ensures process optimisation. The SENTECH thin film metrology range of ellipsometers and reflectometers, in-situ, table top and fully automated tools for use in research and production can be used as part […]

Power Devices

Power devices RF and power device technology is emerging as the future of power converters and systems industries and integrated devices, and 5G implementation. These devices have the advantage of being able to precisely control electrical energy from the source to the load according to the load demand, at high efficiency, and with outstanding reliability. […]

Sensors

Sensors Sensors are devices that detect and measure physical properties or changes in the environment and convert them into electrical signals. These properties can include light, temperature, pressure, humidity, motion, and more. Detection speed, efficiency, and small size make these devices highly suitable for use in many leading-edge and growing industrial applications. SENTECH systems and […]

MEMS

Micro-electromechanical systems (MEMS) Micro-electromechanical systems or MEMS is the umbrella term for many microfabricated devices that enable highly scalable, cost-efficient, mass-produced sensors, actuators, and optics. MEMS have many applications and are often found in for example pressure sensors, acceleration sensors, and microphones due to their extremely high sensitivity, small size, and very low power consumption […]

Optoelectronics

Optoelectronics Optoelectronics is a fast-emerging technology field that consists of applying electronic devices to sourcing, detecting, and optical properties and control of light. Applications include VCSELs, micro-LEDs, and microlenses, all of which have a growing demand in a large number of industrial end-users, including aerospace, space, automotive, consumer electronics, information technology, and healthcare. Industries: Aerospace […]