Does SENTECH offer technical service support?
Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.
Can I send my samples to SENTECH for analysis?
Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.
Does SENTECH offer application support?
SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or […]
SENTECH Metrology System Overview Brochure
Measurement parameters
Sample information Angle of incidence: multiple or single angle measurement Wavelength range Measurement mode: (ψ,Δ), (S1, S2), T, Rp, Rs Mapping options
Dispersion models
Brendel oscillator Cauchy Cody-Lorentz Drude-Lorentz oscillator Effective medium and index gradient Extended Drude Formula Forouhi-Bloomer Hamberg Harmonic oscillator Sellmeier Sernelius Spectrum combination Tanguy Tauc-Lorentz Uniaxial & biaxial anisotropic and others
Simulation parameters
Ellipsometric parameter ψ, Δ, tan (ψ), cos (Δ) Fourier coefficients Reflectance R, Rp, Rs Transmittance T Optical properties n, k, ne, no, ke, ko Material properties ε1, ε2 MSE value Colour values
SpectraRay/4 Spectroscopic Ellipsometry Software
The proprietary SpectraRay/4 SENTECH Spectroscopic Ellipsometry Software, includes data acquisition, modeling, fitting, and extended reporting of ellipsometric, reflection, and transmission data.