SENTECH Metrology System Overview Brochure
SENTECH SI PEALD Brochure
SENTECH Plasma Process Technology Brochure
SENTECH Etchlab RIE Brochure
SENTECH SI 500 D ICPECVD Brochure
SENTECH SI 500 ICP-RIE Brochure
Dispersion models
Cauchy Sellmeier Schott Leng-Lorentz Drude Lorentz Tauc-Lorentz EMA and others
Options
Adapters for different microscopes FTPadv Expert software Certified SENTECH wafer PC
FTPadv-2
Stand-alone, tabletop film thickness probe Spectral range: 430 nm – 930 nm Film thickness range: up to 25 000 nm Y-type fibre bundle Optional PC
FTPadv-1
Stand-alone, tabletop film thickness probe Spectral range: dependent on microscope Film thickness range: up to 25 000 nm Configuration for use with microscope Optional PC