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SENpro Cost-Effective Spectroscopic Ellipsometer

The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.

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Dekoratives Bild

Key features & benefits

Compact design

The SENTECH SENpro combines cost-effectiveness with high performance, delivering reliable VIS-NIR ellipsometry in a compact tabletop system, making it ideal for research labs where space is at a premium.

Discrete angle of incidence

The cost-effective spectroscopic ellipsometer, SENTECH SENpro, comprises a goniometer with discrete angles of incidence in 5°-steps (40° - 90°) to optimise the ellipsometric measurement.

Speed and accuracy

The tool is focused on speed and accuracy for the measurement of thin films wherever they are applied. Applications range from extremely thin layers of 1 nm to thick layers up to 15 μm.

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The SENTECH SENpro spectroscopic ellipsometer features simple operation, measurement speed, and combined data analysis of ellipsometric measurements at different angles of incidence. It measures in the spectral range of 370 nm to 1,050 nm. The spectral range of the tool in combination with the sophisticated software SpectraRay/4 allows for determining the thickness and refractive index of single films and complex layer stacks with ease.

Repeatable and accurate results

The cost-effective, tabletop SENTECH SENpro comprises the VIS-NIR ellipsometer optics, 5°-step goniometer, sample platform, laser alignment, fibre-coupled stabilised light source, and a detection unit. The SENpro comes with the spectroscopic ellipsometer software SpectraRay/4 for system control and data analysis, including modelling, simulation, fitting, and presentation of data. Ready-to-use application files make the operation very easy, even for beginners. SpectraRay/4 supports computer-controlled mapping for uniformity measurements.

The SprectraRay/4 software’s predefined recipes make measurement quick and easy for a large variety of applications.

Highlights

Cost efficiency

The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.

Discreet angle of incidence

The spectroscopic ellipsometer SENpro comprises a goniometer with discreet angles of incidence in 5°-steps (40° - 90°) to optimise the ellipsometric measurement.

Applications

Applications span an extensive range of film thicknesses, from ultra-thin 1 nm semiconductor and microelectronic layers such as SiO₂, Si₃N₄, graphene, and MoS₂, to photovoltaic materials including a-Si:H, perovskites, and TCOs. Spectroscopic ellipsometry can also characterise thicker films up to 15 μm, such as photoresist, nitride, and oxide layers (e.g., ZnO).

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