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SE 400adv Multiple-Angle Laser Ellipsometer

The laser ellipsometer SE 400adv measures thickness and refractive index of transparent thin films, featuring measurement speed, Sub-Angstrom precision in thickness, and per mille accuracy in refractive index determination.

Key features & benefits

Sub-Angstrom accuracy

The stabilised HeNe laser guarantees a precision of 0.1 Å for thin film thickness measurement of ultra-thin single layers.

Push the limits of laser ellipsometry

The multiple angle manual goniometer with superior performance and angle accuracy of this laser ellipsometer allows measuring refractive index, extinction coefficient, and film thickness of single films and layer stacks.

High speed

The measurement speed of the SENTECH SE 400adv laser ellipsometer enables users to monitor single film growth and endpoint detection or to map samples for homogeneity.

The SENTECH SE 400adv is adaptable to your needs by mapping up to 200 mm, liquid cells for in-situ measurement, video camera, autofocus, simulation software, and certified standard wafer.

The options of the SE 400adv support applications in many industries:

Flexibility and modularity

The SENTECH SE 400adv laser ellipsometer can be utilised to characterise single films and substrates from selectable, application-specific angles of incidence. The auto-collimating telescope ensures precise measurement on most kinds of absorbing or transparent substrates with a flat, reflective surface. The fully integrated support of multiple angle measurements (40 ° – 90 ° in steps of 5 °) can be used for determining the thickness, refractive index, and extinction coefficient of layer stacks. Multiple angle measurements are also applied for absolute thickness measurement to compensate for the ambiguity of thickness measurement in laser ellipsometry.

The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra-thin single films. The compact tabletop instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimation telescope, HeNe laser source, and a detection unit. The options of our laser ellipsometer SE 400adv support applications in microelectronics, data storage, display technology, life science, metal processing, and many more leading-edge technologies.

Configurations

SE 400adv

Table top equipment
HeNe-laser for high stability and reproducibility
Highly precise sample alignment
Manual goniometer with superior performance and angle accuracy

SE 401adv

In-situ laser ellipsometer with a time resolution of 40 ms.
HeNe-laser for high stability and reproducibility
Kit for easily mounting the sender and receiver modules to the flanges of a process chamber

FAQ | Can you deliver SENTECH Ellipsometry Systems internationally?

SENTECH has an international network of distributors and technical service experts. We deliver globally, including Europe, Asia, Africa, North and South America. For more details on in-country representation, click here.

FAQ | Does SENTECH offer application support?

SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or contact the team.

FAQ | Can I send my samples to SENTECH for analysis?

Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.

FAQ | Does SENTECH offer technical service support?

Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.