In general, you will need electrical power, compressed air, purging nitrogen, cooling water and a process gas supply and exhaust. You will receive an installation manual with your system, which will outline all of the specific requirements of your purchased system. Our technical service team are available to offer support and answer questions.
- Products
Plasma Process Technology
Plasma Process Technology
Low-damage plasma etch and deposition systems from SENTECH
Thin Film Metrology
Thin Film Metrology
SENTECH thin film metrology tools for repeatable and accurate results
- Application and Industries
Application and Industries
Leading-edge application capabilities from SENTECH
- Company
Company
About SENTECH, news and events
- Careers
- Customer Support
Customer Support
SENTECH Sales, Application and Technical Service support