Technical Service Team
SENTECH is dedicated to guaranteeing smooth and trouble-free operation, maximum uptime, impeccable process quality, and measurement reliability of your systems and tools. We provide remote helpdesk support as well as on-site support by highly experienced field service engineers.
SENTECH Technical Service covers your whole system journey by offering:
- System installation advice and services
- Technical and maintenance training
- Preventive maintenance visits and repairs
- Spare parts and other critical deliveries
- Software updates and hardware upgrades
Contact Information
For all enquires relating to plasma process technology please contact: service.plasma@sentech.deÂ
For all enquiries relating to thin film metrology please contact: service.metrology@sentech.de
Remote support
For a remote support of your system including a direct access
by using the internet, please follow the steps below:
- Contact our SENTECH Service Team
Phone: +49 30 6392 5555 - Download the software manual: SENTECH Remote support
- Download the software package:
 SENTECH Remote Support_2022
and run “Sentech Remote Support.exe” - Send the TeamViewer ID and Password via E-mail
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To see our full list of international technical support facilities please follow the link
Declaration of Contamination
This declaration is neccessary for the repair or maintenance of electrodes, pumps, valves, and other components of plasma technology systems which were in contact with process gases and other potential harmful materials.
Here, service can only be performed with a duly completed and signed declaration of contamination. For each item a separate statement is necessary. The declaration can only be completed and signed by authorized personnel.
The SENTECH International Technical Service Network
Worldwide
Contact:
- Phone: +49 30 6392 5520
- Fax: +49 30 6392 5522
- Email: sales@sentech.de
Address:
- SENTECH Instruments GmbH
- Schwarzschildstrasse 2
- 12489 Berlin
- Germany
Contact Information
For all enquires relating to plasma process technology please contact: service.plasma@sentech.deÂ
For all enquiries relating to thin film metrology please contact: service.metrology@sentech.de
Local Service
China
- SENTECH China Sales Office
- Room 222, Block 2B,
- Gui Gu Liang Cheng,
- No.1 Nong Da South Road, Haidian District, Beijing 100084 P.R.China
Contact:
- Mr. Jianmin Zhou
- Phone: +86 10 8248 8819
- Fax: +86 10 8248 6510
- Mobil: +86 139 0808 1166
- info@sentech-instruments.com.cn
- www.sentech-instruments.com.cn
Korea
- Elim Global Inc.
- A1107, U-Tower, 767 Sinsu-ro, Suji, Yongin Gyeonggi, 16827
- Korea (South)
Contact:
- Mr Chung Yeop Oh
- Phone: +82 31 604 0777
- Fax: +82 31 604 0778
- chungyeop.oh@elim-global.com
- Mr Han Eok Kim
- Phone: +82 31 604 0777
- Fax: +82 31 604 0778
- haneok.kim@elim-global.com
- www.elim-global.com
India
- Labindia Instruments Pvt. Ltd.
- 201, Nand Chambers, L.B.S. Marg.
- Near Vandana Cinema
- Thane 400 602
- India
Contact:
- Metrology Products:
- Mr. Anoop Kumar
- Phone: +91 22 2598 6062
- Fax: +91 22 2533 5940
- kumara@labindia.com
- Plasma Process Technology:
- Dr. Samik Pal
- Phone: +98 30383100
- Fax: +91 22 2533 5940
- samikp@labindia.com
- www.labindiainstruments.com
Poland
- LabSoft Sp. z.o.o.
- ul. Puławska 469
- 02-844 Warsaw
- Poland
Contact:
- Dr inż. Marta Izydorzak-Wozniak
- Phone: +48 (22) 8532793
- Mobil: +48 667 617 428
- mi@labsoft.pl
- mn@labsoft.pl
- www.labsoft.pl
Singapore & Malaysia
- Link Fab Technologies Pte Ltd
- 7030, Ang Mo Kio Ave 5, #06-05
- Northstar@AMK
- Singapore 569880
Contact:
- Mr. Dennis Lee
- Phone: +65 6745 0605
- Fax: +65 6742 0605
- dennis@linkfab.com.sg
- www.linkfab.com.sg
Russia
- MINATEH (micro and nano technology)
- Tkatskaya str. 5
- building 1, floor 3
- 105318 Moscow
- Russia
Contact:
- Mr. Sergey Verzhbitskiy
- Phone +7 (495) 909-89-53 / 54
- Mobil: +7 (926) 134-6915
- info@minateh.ru
- www.minateh.ru
Turkey
- FOTONIKA A.S.
- Umit Mah. 2532. Sokak
- NO: 11/2 06810 Çayyolu
- Ankara, Turkey
Contact:
- Mr Zafer Kesgin
- Dr Yetkin Arslan
- Phone: + 90 312 212 9 222
- Fax: +90 312 212 7 222
- info@fotonika.com.tr
- www.fotonika.com.tr
Spain & Portugal
- SENTECH Instruments GmbH
- Schwarzschildstrasse 2
- 12489 Berlin
- Germany
Contact:
- Gerd Jungmann
- Phone: +49 30 6392 5520
- Fax: +49 30 6392 5522
- marketing@sentech.de