- Spot for mapping uniformity of test wafers
- Micro spots and pattern recognition for small fields of analysis
- Extremely repeatable measurements with a high-precision spectroscopic ellipsometer, applying the most accurate Step Scan Analyser measurement mode, with no moving optical parts during data acquisition
- Products
Plasma Process Technology
Plasma Process Technology
Low-damage plasma etch and deposition systems from SENTECH
Thin Film Metrology
Thin Film Metrology
SENTECH thin film metrology tools for repeatable and accurate results
- Application and Industries
Application and Industries
Leading-edge application capabilities from SENTECH
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Company
About SENTECH, news and events
- Careers
- Customer Support
Customer Support
SENTECH Sales, Application and Technical Service support