SECS/GEM
Basic SECS/GEM integration with communication to MES Advanced SECS/GEM integration, including process program management and remote control by MES
SENDURO accuva10 Fully-Automated Thin Film Quality Control
The SENDURO accuva10 is designed for fully automated, precise and repeatable measurement of film thickness, refractive index, and extinction coefficient of materials relevant to MEMS and sensor fabrication.