Does SENTECH offer technical service support?
Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.
Can I send my samples to SENTECH for analysis?
Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.
Does SENTECH offer application support?
SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or […]
Can you deliver SENTECH Ellipsometry Systems internationally?
SENTECH has an international network of distributors and technical service experts. We deliver globally, including Europe, Asia, Africa, North and South America. For more details on in-country representation, click here.
SENTECH SENDURO accuva10 Brochure
Spectroscopic ellipsometer
Spot for mapping uniformity of test wafers Micro spots and pattern recognition for small fields of analysis Extremely repeatable measurements with a high-precision spectroscopic ellipsometer, applying the most accurate Step Scan Analyser measurement mode, with no moving optical parts during data acquisition
Reflectometer
Smallest spot size for the smallest fields of analysis Fast measurement time for efficient mapping
Pattern recognition
Fully automated pattern recognition for measuring in fields of analysis Two-step pattern recognition of alignment marks and fields of analysis Easy teaching of new patterns
Edge Grip
Minimum edge exclusion Flexibility for multiple wafer sizes with quick change
Multiple cassette stations
2 cassette/carrier stations with flexible carrier size Automatic cassette/carrier detection: presence and size