Does SENTECH offer technical service support?

Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.

Can I send my samples to SENTECH for analysis?

Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.

Does SENTECH offer application support?

SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or […]

Applications

Applications span an extensive range of film thicknesses, from ultra-thin 1 nm semiconductor and microelectronic layers such as SiO₂, Si₃N₄, graphene, and MoS₂, to photovoltaic materials including a-Si:H, perovskites, and TCOs. Spectroscopic ellipsometry can also characterise thicker films up to 15 μm, such as photoresist, nitride, and oxide layers (e.g., ZnO).

Discreet angle of incidence

The spectroscopic ellipsometer SENpro comprises a goniometer with discreet angles of incidence in 5°-steps (40° - 90°) to optimise the ellipsometric measurement.

Cost efficiency

The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.