Does SENTECH offer technical service support?
Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.
Can I send my samples to SENTECH for analysis?
Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.
Does SENTECH offer application support?
SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or […]
SENTECH RM 1000 QC Brochure
Options
200 mm or 300 mm x-y mapping stage Extended spectral range to the NIR Reduced spot size optics, allows measurement inside squares less than 90 μm Option to measure wafer bow and stress Software interface to MES using SEC/GEM protocol
RM 1000 QC Automated Spectroscopic Reflectometer for Quality Control
The RM 1000 QC is designed for fast and easy thickness measurement of transparent and semi-transparent films on patterned wafers for quality control within industrial production processes.