Does SENTECH offer technical service support?
Yes, SENTECH has a large network of technical service experts who offer in-country support for both plasma process technology and thin film metrology systems. Remote or on-site support is possible depending on your requirements. Click here to find out more or to contact the team.
Can I send my samples to SENTECH for analysis?
Yes, SENTECH has two application labs in-house. You can contact our application team, who will share with you all the details and provide a sample analysis form for you to complete. Click here for further information and contact details.
Does SENTECH offer application support?
SENTECH has a large team of application experts for both plasma process technology and thin film metrology. At our campus are two laboratories which are used to process and characterise customer samples, for system demonstrations and customer training. SENTECH offers application support for the lifecycle of your system. Learn more about our application support or […]
SENTECH RM 1000/2000 Brochure
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Mapping (up to 200 x 200 mm2) Second objective lens SprectraRay/4 software PC
FTPadv EXPERT
Material database including: Dielectrics on semiconductors, Epitaxial films on semiconductors Metallic films on semiconductors Films on metallic substrates Films on transparent substrates
RM 2000
Spectral range: 200 nm - 1000 nm Film thickness range: 2 nm – 50 µm Spot size: 100 µm
RM 1000
Spectral range: 410 nm - 1000 nm Film thickness range: 20 nm – 100 µm Spot size: 80 µm
RM 1000 and RM 2000 Spectroscopic Reflectometry Tools
The spectroscopic reflectometry using the RM 1000/2000 features UV to NIR spectral range from 200 nm – 1000 nm. The optical layout is optimised for light throughput for reliable measurements of n and k even on rough or curved surfaces and with precise height and tilt adjustment.