Key features & benefits
The shortest way to film thickness
By selecting and starting an appropriate recipe, the SENTECH FTPadv reflectometer gives thickness measurement in less than 100 ms with precision of less than 0.3 nm and in a thickness range of 30 nm – 25 µm.
Unique AutoModel feature and SE-based material library
Operator errors are reduced to a minimum by the comparison between the measured reflection spectrum and the spectra library. A large material library based on the SENTECH most accurate spectroscopic ellipsometry measurement, supplies recipes for the measurements of optical constants of new materials.
Best application expertise
For over 30 years, SENTECH has successfully sold the FTPadv Film Thickness Probe for various applications. This table-top reflectometer features thickness measurement of small samples up to large window panes, in-situ or inline, at low or high temperatures, in industrial or research environments, by remote or direct control.
The SENTECH FTPadv tabletop reflectometer accurately and reproducibly probes the thickness and refractive index of transparent and weakly absorbing films on reflective and transparent substrates. The tool can be attached to a microscope or be equipped with a stabilised light source for thickness measurement of layers up to a thickness of 25 µm (thicker on request). The extensive database of predefined, customer-proven, and ready-to-use applications benefits from the extensive spectroscopic ellipsometry expertise of SENTECH.
Flexibility and modularity
A key feature of the SENTECH FTPadv is the thickness measurement of any layer from a multilayer sample, making the FTPadv the ideal, cost-effective solution, for film thickness measurement. The FTPadv for process control comprises an optical fibre bundle with post and sample holder, a stabilised light source with a halogen lamp, and the FTP optics and controller station. LAN connection to PC allows remote control of the tool in harsh industrial applications environment, specially protected rooms, or large machinery.
The reflectometer FTPadv comes with an extensive and comprehensive number of predefined recipes, such as dielectrics on semiconductors, semiconductors on semiconductors, polymers on silicon, films on transparent substrates, films on metallic substrates, and more. The unique AutoModel feature allows the fast detection of sample types by comparison with the spectra library. This reflectometer reduces operator errors to a minimum. Film thickness measurement by optical reflection has never been so easy.
The FTPadv menu-driven operation software permits thickness measurement of single and multiple-layer structures with excellent operator guidance. Furthermore, it features powerful analysing tools and outstanding reporting functionality. Additional mapping software is available to control a motorised sample stage. Upgrading the software to the software package FTPadv EXPERT for advanced analysis of reflection measurements extends the standard software package by the application of materials with unknown or differing optical properties. So, thickness measurement and the analysis of the refractive index and extinction coefficient of single films are possible.
Configurations:
- Stand-alone, tabletop film thickness probe
- Spectral range: dependent on microscope
- Film thickness range: up to 25 000 nm
- Configuration for use with microscope
- Optional PC
- Stand-alone, tabletop film thickness probe
- Spectral range: 430 nm – 930 nm
- Film thickness range: up to 25 000 nm
- Y-type fibre bundle
- Optional PC
- Adapters for different microscopes
- FTPadv Expert software
- Certified SENTECH wafer
- PC
