Spectroscopic Reflectometry

The spectroscopic reflectometer RM 1000/2000 features UV to NIR spectral range from 200 nm – 930 nm. The optical layout is optimied for light throughput for reliable measurements of n and k even on rough or curved surfaces. Precise height and tilt adjustment leads to accurate single beam reflectance measurements, stable day after day.

The FTPadv is a cost-effective table top solution for spectroscopic reflectometry which features rapid thickness measurements. A measurement is performed in less than 100 ms with a precision of lower than 0.3 nm and film thickness range of 50 nm – 25 µm. A broad range of predefined recipes are included for easy spectroscopic reflectometry operation

The spectroscopic reflectometry software FTPadv Expert is especially designed for measuring and analysing R(λ) and T(λ). Spectral data analyses for determining thin film thickness, extinction coefficient or refractive index of materials have been implemented into the software, enabling the material description and fitting by standard industry parameters.