Key features & benefits
Widest spectral range and highest spectral resolution
The SENTECH SENresearch 4.0 spectroscopic ellipsometer covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR). High spectral resolution is offered to analyse even thick films up to 200 µm thickness using FTIR ellipsometry.
No moving parts with SSA principle
There are no moving optical parts during data acquisition for best measurement results. The Step Scan Analyser (SSA) principle is a unique feature of the SENresearch 4.0 spectroscopic ellipsometer.
Full Mueller matrix by innovative 2C design
The extension of the SSA principle by the innovative 2C design allows measurement of the full Mueller matrix. The 2C design is a field upgradable and cost-effective accessory.
Automated height and
tilt adjustment
Options and field up –
gradeable accessories
Motorised pyramid
goniometer (20° – 100°)
The SENTECH SENresearch 4.0 uses fast FTIR ellipsometry for the NIR up to 2,500 nm or 3,500 nm, respectively. It provides the broadest spectral range with the best S/N ratio and the highest, selectable spectral resolution. Silicon films up to 200 µm thickness can be measured. The measurement speed of FTIR ellipsometry compares to diode array configurations, which are also selectable up to 1,700 nm.
Flexibility and modularity
The motorised pyramid goniometer features an angle range from 20 deg to 100 deg. Optical encoders ensure the highest precision and long-term stability of angle settings. The spectroscopic ellipsometer arms can be moved independently for scatterometry and angle-resolved transmission measurements.
The tool operates on the Step Scan Analyser (SSA) principle. The SSA decouples the intensity measurement from mechanical movement, thereby allowing the analysis of even rough samples. All optical parts are at rest during data acquisition. Furthermore, the SENTECH SENresearch 4.0 includes a fast measurement mode for mapping and in-situ applications.
Customised ellipsometers of the SENresearch 4.0 can be configured for standard and advanced applications. Examples are dielectric layer stacks, textured surfaces, and optical and structural (3D) anisotropic samples. Predefined recipes are provided for a large variety of applications.
SpectraRay/4 is the comprehensive spectroscopic ellipsometer software for the tool. It comprises two modes of operation: The recipe mode and the interactive mode. The recipe mode allows for easy execution of routine applications. The interactive mode guides the ellipsometric measurement through an interactive graphical user interface.
Configurations:
DUV – VIS
190 – 1,000 nm
240 – 1,000 nm
NIR with Diode-Array
190 – 1,700 nm
240 – 1,700 nm
NIR with FTIR
190 – 2,500 nm
190 – 3,500 nm
240 – 2,500 nm
240 – 3,500 nm
- Manual goniometer
- Motorised Pyramid Goniometer
- In situ, in line, and desktop
- Reflectometer
- Mapping
- Turntable for anisotropic samples
- 2C for full Mueller matrix measurement
- Video based auto-align
- Microspots
- Liquid cells
- Heating and cooling stage
- Transmission holder
The options of the SENresearch 4.0 support applications in many industries:
- Microelectronics
- Glass coatings
- Display technology
- Bioscience
- Life science
