Key features & benefits
Discrete angle of incidence
The SENTECH SENpro spectroscopic ellipsometer comprises a goniometer with discrete angles of incidence in 5°-steps (40° – 90°) to optimise the ellipsometric measurement.
Step Scan Analyser principle
The unique Step Scan Analyser principle is featured by the SENpro. During data acquisition, the polariser and compensator are fixed to provide the highest accuracy of the ellipsometric measurement.
Speed and accuracy
The tool is focused on speed and accuracy for the measurement of thin films wherever they are applied. Applications range from extremely thin layers of 1 nm to thick layers up to 15 μm.
The SENTECH SENpro spectroscopic ellipsometer features simple operation, measurement speed, and combined data analysis of ellipsometric measurements at different angles of incidence. It measures in the spectral range of 370 nm to 1,050 nm. The spectral range of the tool in combination with the sophisticated software SpectraRay/4 allows for determining the thickness and refractive index of single films and complex layer stacks with ease.
Repeatable and accurate results
The cost-effective, tabletop SENTECH SENpro comprises the VIS-NIR ellipsometer optics, 5°-step goniometer, sample platform, laser alignment, fibre-coupled stabilised light source, and a detection unit. The SENpro comes with the spectroscopic ellipsometer software SpectraRay/4 for system control and data analysis including modelling, simulation, fitting, and presentation of data. Ready-to-use application files make the operation very easy even for beginners. SpectraRay/4 supports computer-controlled mapping for uniformity measurements.
The SprectraRay/4 software’s predefined recipes make measurement quick and easy for a large variety of applications.
SENpro Features:
The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.
The spectroscopic ellipsometer SENpro comprises a goniometer with discreet angles of incidence in 5°-steps (40° – 90°) to optimise the ellipsometric measurement.
The unique Step Scan Analyser principle is featured by SENpro. During data acquisition, polariser and compensator are fixed to provide highest accuracy of the ellipsometric measurement.
