Key features & benefits
Sub-Angstrom accuracy
The stabilised HeNe laser guarantees a precision of 0.1 Å for thin film thickness measurement of ultra-thin single layers.
Push the limits of laser ellipsometry
The multiple angle manual goniometer with superior performance and angle accuracy of this laser ellipsometer allows measuring refractive index, extinction coefficient, and film thickness of single films and layer stacks.
High speed
The measurement speed of the SENTECH SE 400adv laser ellipsometer enables users to monitor single film growth and endpoint detection or to map samples for homogeneity.
The SENTECH SE 400adv is adaptable to your needs by mapping up to 200 mm, liquid cells for in-situ measurement, video camera, autofocus, simulation software, and certified standard wafer.
Flexibility and modularity
The SENTECH SE 400adv laser ellipsometer can be utilised to characterise single films and substrates from selectable, application-specific angles of incidence. The auto-collimating telescope ensures precise measurement on most kinds of absorbing or transparent substrates with a flat, reflective surface. The fully integrated support of multiple angle measurements (40 ° – 90 ° in steps of 5 °) can be used for determining the thickness, refractive index, and extinction coefficient of layer stacks. Multiple angle measurements are also applied for absolute thickness measurement to compensate for the ambiguity of thickness measurement in laser ellipsometry.
The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra-thin single films. The compact tabletop instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimation telescope, HeNe laser source, and a detection unit. The options of our laser ellipsometer SE 400adv support applications in microelectronics, data storage, display technology, life science, metal processing, and many more leading-edge technologies.
Configurations:
- Table top equipment
- HeNe-laser for high stability and reproducibility
- Highly precise sample alignment
- Manual goniometer with superior performance and angle accuracy
- In-situ laser ellipsometer with a time resolution of 40 ms.
- HeNe-laser for high stability and reproducibility
- Kit for easily mounting the sender and receiver modules to the flanges of a process chamber
The options of the SE 400adv support applications in many industries:
- Microelectronics
- Life science
- Data storage
- Display technology
- Metal processing
