Key features & benefits
Unambiguous thickness determination
The combination of ellipsometry and reflectometry allows for fast and unambiguous determination of the thickness of transparent films by automatic identification of the cyclic thickness period.
Largest measurement range
The combination of laser ellipsometer and reflectometry extends the thickness range for transparent films up to 25 µm or more depending on the photometer option chosen.
Push the limits of laser ellipsometry
The multiple-angle manual goniometer with superior performance and angle accuracy enables the measurement of refractive index, extinction coefficient, and film thickness of single films and layer stacks.
The SENTECH SE 500adv combines ellipsometry and reflectometry to eliminate the ambiguity of measuring the layer thickness of transparent films. It extends the measurable thickness to 25 µm. Therefore, the SE 500adv extends the capability of the standard laser ellipsometer SE 400adv, especially for analysing thicker films of dielectrics, organic materials, photoresists, silicon, and polysilicon.
Flexibility and modularity
The SENTECH SE 500adv can be operated as a laser ellipsometer, as a film thickness probe, and as a CER ellipsometer. Consequently, it offers maximum flexibility never reached by standard laser ellipsometers. Operated as an ellipsometer, single and multiple-angle measurements can be performed. When operated as a film thickness probe, the thickness of a transparent or weakly absorbing film is measured under normal incidence.
The combination of ellipsometry and reflectometry (CER) in the SE 500adv comprises the ellipsometer optics, goniometer, combined reflection measurement head and auto-collimating telescope, sample platform, HeNe laser source, laser light detection unit, and photometer.
Customise your tool:
- Mapping up to 200 mm,
- Liquid cells for in situ measurement,
- Video camera,
- Autofocus,
- Motorised goniometer,
- SpectraRay 4.0 simulation software,
- Certified standard wafer
The options of the SE 500adv support applications in many industries:
- Microelectronics
- Microsystems technology
- Photovoltaics
- Display technology
- Chemistry
